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Coma Technology Co., Ltd. directly manufactures all Silicon parts used in Semiconductor/Display Equipment for all processes.
One Piece Electrode
Coma Technology is making a revolutionary contribution by increasing production efficiency and reducing cost through addressing the etching and particle issues of the material by changing to harder, higher chemical and etch resistance Sapphire Material.
(Chamber View Port Window)
(Injector / Nozzle / Tip)
(Sapphire Tube and other Sapphire Products)
Coma Technology is continuously expanding the possibilities of new technologies through Ceramic Materials applicable to various fields.
(POROUS CERAMIC VACUUM CHUCK)
(CERAMIC PLUNGER / High Pressure Pump Piston)
Ceramic Ring, Insulator, Robot Hand,
Injector, Nozzle, Various Ceramic Products Such As Bonding Jigs And Heaters
Inner End Polishing Technology for Integrated Silicon Electrode for Semiconductor Etching Process
Hydrofluoric Acid and Alkali Etching Technology for Silicon Electrode and Silicon Ring used in Semiconductor Etching Process
Sapphire Micro-Hole (less than 0.3mm) Processing Technology
Improved Curved Surface Roughness (Curve Polishing Technology)
Sapphire-Ceramic Bonding Technology (Sapphire+Sapphire, Sapphire+Ceramic)
Porous Ceramic, Porous Vacuum Chuck , Vacuum Line Design and Manufacturing Technology (Flatness Guaranteed)
Ultra Fine Flow Measurement Technology (Nozzle)
Ceramic Plunger (Piston for High Pressure Pump) manufacturing Technology (Concentricity, Straightness under 2㎛)
Large Diameter Ceramic Flattening Technology (Ultra Precision Lapping Technology.
Diamond Window Polishing Technology (First in the World)
Mirror Polishing Technology for Metal (Aluminum, SUS, Carbide, Etc)